JPH0320440U - - Google Patents
Info
- Publication number
- JPH0320440U JPH0320440U JP7935389U JP7935389U JPH0320440U JP H0320440 U JPH0320440 U JP H0320440U JP 7935389 U JP7935389 U JP 7935389U JP 7935389 U JP7935389 U JP 7935389U JP H0320440 U JPH0320440 U JP H0320440U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- push
- bar
- sheet
- compression spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7935389U JPH0320440U (en]) | 1989-07-04 | 1989-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7935389U JPH0320440U (en]) | 1989-07-04 | 1989-07-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0320440U true JPH0320440U (en]) | 1991-02-28 |
Family
ID=31623437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7935389U Pending JPH0320440U (en]) | 1989-07-04 | 1989-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0320440U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012182342A (ja) * | 2011-03-02 | 2012-09-20 | Fuji Electric Co Ltd | 半導体基板のエキスパンド装置およびエキスパンド処理方法 |
-
1989
- 1989-07-04 JP JP7935389U patent/JPH0320440U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012182342A (ja) * | 2011-03-02 | 2012-09-20 | Fuji Electric Co Ltd | 半導体基板のエキスパンド装置およびエキスパンド処理方法 |